@article {,
	title = {Plasma diagnostics and devices properties of AlGaN/GaN HEMT passivated with SiN deposited by plasma-enhanced Chemicals vapour deposition},
	journal = {Journal of Physics D: Applied Physics},
	volume = {43},
	year = {2010},
	month = {11/2010},
	pages = {1-8},
	issn = {0022-3727},
	doi = {10.1088/0022-3727/43/49/495202},
	author = {M. F. Romero and E. Mu{\~n}oz. and M.M. Sanz and I. Tanarro and A. Jim{\'e}nez}
}
