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    Plasma diagnostics and devices properties of AlGaN/GaN HEMT passivated with SiN deposited by plasma-enhanced Chemicals vapour deposition

    TitlePlasma diagnostics and devices properties of AlGaN/GaN HEMT passivated with SiN deposited by plasma-enhanced Chemicals vapour deposition
    Publication TypeJournal Article
    Año de publicación2010
    AutoresMuñoz, E, Romero, MF, Sanz, MM, Tanarro, I, Jiménez, A
    Idioma de publicaciónEnglish
    JournalJournal of Physics
    Volumen43
    Número49
    Páginas1-8
    Fecha de publicación2010
    ISSN1088-0022
    DOI10.1088/0022-3727/43/49/495202

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